FIELD: electricity.
SUBSTANCE: invention relates to the ion current density determining means onto the contacting with plasma wall. In the claimed method, by the single mobile Langmuir flat probe electrical parameters spatial distribution in the plasma recording, with the subsequent measurement results processing, which, according to the proposal, are carried out by the Langmuir paralleling probe simulator, and as its electrical parameters, recording the probe total volt-ampere characteristics. Device comprises inserted into the gas discharge space mobile single flat Langmuir probe, probe collecting surface is made in the form of wire end fixed in the ceramic rod flush with its end, which area exceeds the probe collecting surface by factor of ten or more, rod is provided with external support electrode with the developed surface. At the ceramic rod opposite end, both conductors are withdrawn from its channels and connected to the recording equipment. In the case of working with HF plasma, the adjacent to the reference electrode ceramic rod surface is surrounded by the grounded metal shield.
EFFECT: increase in the accuracy and reliability of the ion current density determining on the contacting the gas-discharge plasma under a floating potential solid wall, which role in high-frequency ion engines is performed by the ion-optical system emission electrode.
6 cl, 4 dwg
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Authors
Dates
2018-07-06—Published
2016-03-15—Filed