TECHNOLOGIES FOR PRODUCING FLEXIBLE AND TRANSPARENT ELECTRONIC COMPONENTS BASED ON GRAPHENE-LIKE STRUCTURES IN A POLYMER FOR ELECTRONICS AND MICROELECTRONICS Russian patent published in 2022 - IPC H01L21/56 H01L51/50 B82Y30/00 

FIELD: electronics.

SUBSTANCE: invention relates to the manufacture of flexible and transparent components of electronics and microelectronics, such as printed circuit boards, integrated circuits, components of radio electronics, e.g., radio frequency identification microchips, flexible transparent antennas, and other electronic components, based on graphene-like structures, in particular, structures of single- or multilayer graphene, or graphene oxide, or modifications thereof, in a polymer. Method for producing flexible and transparent electronic components based on graphene-like structures in a polymer according to the invention includes the following stages: selecting a sacrificial substrate — simple (flat) or complex, containing 3D volumetric elements or with a 3D shape profile, and creating, on the surface thereof, areas catalysing the synthesis of a graphene-like structure; synthesising a graphene-like structure in the synthesis-catalysing areas of the substrate surface; encapsulating the graphene-like structure in the carrier polymer directly on the substrate; removing the sacrificial substrate and the catalytic material, and encapsulating the synthesised structure in the volume of the carrier polymer.

EFFECT: invention provides a possibility of simplifying the method for producing graphene-like structures with a high degree of structural perfection.

46 cl, 3 dwg