FIELD EMISSION ELEMENT AND METHOD OF ITS MANUFACTURE Russian patent published in 2018 - IPC H01J9/02 H01J1/02 H01J1/304 

FIELD: electronic equipment.

SUBSTANCE: invention relates to electronic engineering, in particular to field emission elements containing carbon nanotubes used as cathodes, and also to a method for manufacturing them. Field emission element comprises electrically conductive substrate 1, dielectric layer 3 disposed thereon, above which is drawing layer 5, in a structure consisting of pulling 5 and dielectric 3 layers, matrix of through holes 7 is made, on their walls insulating layer 6 is located, and on the bottom of the holes there is layer of catalyst 4, where array of carbon nanotubes 2 is formed. Method of manufacturing the field emission element comprises the formation of a catalyst layer on an electrically conductive substrate for growing carbon nanotubes, forming a mask for etching the catalyst layer, liquid chemical etching of the catalyst layer to form catalyst sections for the subsequent growth of carbon nanotubes, removing the mask, plasma-chemical deposition of the dielectric layer, magnetron deposition of the drawing layer, forming a mask for etching the structure consisting of a pulling and dielectric layers, above the previously formed sections of the catalyst for the subsequent growth of carbon nanotubes, plasma-chemical anisotropic etching with the formation of holes in the drawing and dielectric layers up to the catalyst bed, removal of the mask, isotropic deposition of the insulating layer, anisotropic plasma-chemical etching of the insulating layer on the drawing layer and in the bottom of the holes to the catalyst layer with the formation of an insulating layer on the lateral surfaces of the holes, vapor phase synthesis of carbon nanotubes on a catalyst.

EFFECT: technical result is prevention of short circuits, reduction of leakage currents, increase of emission current, reliability and increase in yield.

12 cl, 12 dwg