METHOD FOR MANUFACTURING A THIN-FILM PROTECTIVE COATING ON THE SURFACE OF THERMOELECTRIC MATERIALS Russian patent published in 2022 - IPC H01L35/34 

Abstract RU 2779528 C1

FIELD: protective coatings.

SUBSTANCE: invention relates to thermoelectric instrumentation and can be used for the manufacture of protective coatings in the production of thermoelements. Essence: the method includes mechanical processing, ion etching of the surface of a thermoelectric material (TEM) and plasmochemical application of a protective coating in the form of thin films of silicon dioxide or nitride. Mechanical treatment of the TEM surface is carried out to a roughness not exceeding the thickness of the formed thin film of the protective coating.

EFFECT: increase in the TEM operating temperature range due to the application of a thermostable thin-film protective coating on the TEM surface, suppressing the sublimation of TEM components, not reducing the temperature difference between the junctions of a thermoelement having high adhesive strength with the TEM surface.

1 cl, 3 dwg

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Authors

Shtern Maksim Yurevich

Rogachev Maksim Sergeevich

Shtern Yurij Isaakovich

Kozlov Aleksandr Olegovich

Korchagin Egor Pavlovich

Dates

2022-09-08Published

2021-12-07Filed