BOLOMETER, HEAT SENSOR, THERMAL VISOR, BOLOMETER OPERATION METHOD, HEAT SENSOR OPERATION METHOD Russian patent published in 2022 - IPC G01J5/20 H01L27/14 

FIELD: sensors.

SUBSTANCE: invention relates to a bolometer, a thermal sensor, a thermal imager, a method for operation of a bolometer, a method for operation of a thermal sensor. The bolometer according to the invention contains a substrate, thermally insulating bridges, a microresonator, two waveguides, a laser, and a photodetector. A thermal sensor containing a two-dimensional matrix of bolometers is proposed. In each of the columns, all microresonators have one first waveguide and one laser. A frequency modulator is connected to each laser. In each row, all microresonators have one second waveguide and one photodetector. A thermal imager is proposed, containing a thermal sensor, an optical system, and a controller. Moreover, the thermal sensor is located in the focal plane of the optical system.

EFFECT: present invention provides a bolometer, a thermal sensor, a thermal imager having compact dimensions and increased sensitivity.

21 cl, 5 dwg