BOLOMETER, HEAT SENSOR, THERMAL VISOR, BOLOMETER OPERATION METHOD, HEAT SENSOR OPERATION METHOD Russian patent published in 2023 - IPC G01J5/20 H01L27/14 

FIELD: thermal sensors.

SUBSTANCE: invention relates to a bolometer, a thermal sensor, a thermal imager of compact dimensions. The bolometer according to the invention contains a thermally stabilized transparent substrate, thermally insulating bridges, a microresonator, a waveguide, a laser, and a photodetector. The microresonator is a disk made of a nonlinear optical material, the microresonator being held by thermally insulating bridges elevated above the thermally insulating substrate, the microresonator disk contains an output diffraction grating, the waveguide is located above the microresonator with a gap from the microresonator, the laser is configured to direct radiation into the waveguide and generate radiation at a known length waves, the photodetector is configured to receive radiation coming out of the output diffraction grating of the microresonator. The thermal sensor contains a two-dimensional matrix of bolometers and a controller. The thermal imager contains a thermal sensor, an optical system, and the thermal sensor is located in the focal plane of the optical system.

EFFECT: invention provides a bolometer, a thermal sensor, a thermal imager having compact dimensions and increased sensitivity.

23 cl, 7 dwg