METHOD FOR ELECTROCHEMICAL DEPOSITION OF CoNiFe TERNARY ALLOY FILMS Russian patent published in 2023 - IPC C25D3/56 

FIELD: electroplating.

SUBSTANCE: invention relates to the deposition of CoNiFe ternary alloy films for elements of integrated microsystems concentrating or shielding a magnetic field. The method includes the deposition of films in a galvanic bath with vertical electrodes at a temperature of 70± 10° C, with stirring chloride electrolyte purified by filtration from iron oxides; deposition is carried out in local areas limited by a photoresistive mask on an oxidized silicon plate metallized with nickel with a nichrome sublayer, metallization is in contact with a nickel current lead of the cathode potential at the edge of the plate, a graphite plate serves as an anode, while deposition is carried out from an electrolyte with a content of 0.005-0.5 mol/l cobalt chloride CoCl₂⋅ 6H₂O; 0.005-0.5 mol/l nickel chloride NiCl₂⋅6H₂O; 0.005-0.5 mol/l iron chloride FeCl₂⋅ 4H₂O ; with additives in the electrolyte 1.0-10.0 ml/l of glycolic acid complexing agent with the chemical formula C₂H₄ O₃; 0.3±0.05 ml/l hydrochloric acid HCl (30%) to obtain pH=1.7±10%; 0.5-10.0 ml/l catapine KI-1 C₆H₅CH₂(-C₆H₄CH₂-)_mCl with m=12-18 carbon atoms of an acid corrosion inhibitor; the process is carried out by the galvanostatic method on a nickel sublayer with a negative sign of mechanical deformation with respect to the CoNiFe film.

EFFECT: reduction of mechanical stresses in the production of magnetically soft CoNiFe alloy films for concentrators and magnetic field screens in magnetically sensitive semiconductor microcircuits.

1 cl, 5 dwg