METHOD OF ELECTROCHEMICAL DEPOSITION OF NiFe PERMALLOY FILMS WITH INCREASED ACCURACY REPRODUCIBILITY COMPOSITION Russian patent published in 2019 - IPC C25D3/56 C25D5/02 

FIELD: electroplating.

SUBSTANCE: invention relates to the field of electroplating and can be used to obtain a magnetic material of the elements of integrated microsystems concentrating or shielding a magnetic field. Method involves the deposition of a film in a galvanic bath at a current density of 20 ± 1.0 mA/cm², temperature 60–70 °C with stirring electrolyte containing nickel chloride NiCl₂⋅6H₂O and ferric chloride FeCl₂⋅4H₂O, providing the ratio of the concentrations of nickel atoms and iron N_Ni/N_Fe = 4.26, boric acid H₃IN₃ – 30 g/l, saccharin baking powder C₇H₅NO₃S – 5 g/l, hydrochloric acid HCl (30 %) to obtain a pH of 1.7 ± 10 %, deposition is carried out in local areas limited by a photoresistive mask on an oxidized silicon wafer metallized with nickel with a nichrome underlayer, while the metallized layer is in contact with the nickel cathode electrode on the edge of the plate, the electrolyte is purified from ferric iron by filtering ferric oxide in the preparation, and to compensate for the removed ferric chloride and an increased nickel deposition rate, electrolyte is supplemented with purified ferrous chloride to form the Ni₈₁Fe₁₉ composition, and during the deposition of films by the anode serves the carbon plate.

EFFECT: technical result: improving the reproducibility of the exact composition of permalloy films and improving their magnetic properties.

1 cl, 4 dwg