FIELD: optoelectronics.
SUBSTANCE: thermal catalytic sensor based on a ceramic MEMS platform and method for its manufacture. The invention is intended for obtaining transparent conductive coatings by microplotter printing. The invention can be used to create optoelectronic devices such as photodetectors and organic light emitting diodes. The transparent conductive coating is a two-layer system obtained by microplotter printing. The lower layer of the coating before the formation of the upper layer is an array of silver nanowires, which provides the main contribution to the conductivity of the two-layer coating, and the upper layer is a polymer composite based on single-walled carbon nanotubes, which performs a protective function - ensuring long-term stability of the layered resistance of the coating and resistance to mechanical stress.
EFFECT: targeted deposition of functional ink with positioning accuracy of the pattern element on the substrate at the level of 5 μm, high uniformity of the thickness of the resulting coatings, minimizing the consumption of silver nanowires, which are an expensive material, thereby reducing the cost of manufactured devices.
3 cl, 1 dwg, 5 ex
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Authors
Dates
2023-05-11—Published
2022-08-08—Filed