GETTER PUMP (VARIANTS) Russian patent published in 2023 - IPC F04B37/02 F04B37/04 H01J7/18 

FIELD: vacuum systems; getter pumps.

SUBSTANCE: technical solution relates to getter pumps and can be used to maintain high and ultra-high vacuum in various vacuum devices and systems. The getter pump contains a frame and a plurality of getter elements formed from a non-evaporable getter material in the form of plates. The frame contains three or more side walls, which are made in the form of plates and are fixed relative to each other in such a way that they lie in the planes of the side faces of the imaginary prism, one side wall in each side face, and the number of side faces of the mentioned imaginary prism is equal to the number of the mentioned side walls. Thus, there is space between the side walls. In said side walls, a plurality of through cuts are made, while the getter elements are located in the space between the side walls in planes crossing the side walls of the frame so that the edges of the getter elements are placed in the through cuts made in the side walls, and the getter elements are separated from each other by gaps. In the embodiment of the getter pump, the plurality of through cuts made in the side walls contains at least one through hole, along the edge of which a plurality of pairs of protrusions are made, and the protrusions constituting the pair are located on opposite sides of the said through hole and are placed in a gap separating adjacent getter elements from each other.

EFFECT: reducing the total area of the gas-emitting surfaces, increasing the conductivity of the evacuated gas to the gas-absorbing surfaces of the gas-absorber elements, unifying the components of the gas-absorber pump in terms of geometric parameters, and reducing the variety of components of the getter pump during its manufacture.

11 cl, 8 dwg