PUMPING VACUUM DEVICE Russian patent published in 2023 - IPC F04B37/14 

FIELD: technical physics.

SUBSTANCE: invention can be used for pumping gases and maintaining vacuum in vacuum systems. The evacuation vacuum device consists of an electron emitter - cathode 2, an electrode under a positive potential relative to the cathode - anode 1 and an ion collector 3, covering cathode 2 and anode 1 and being under a negative potential relative to cathode 2. The device has an axis of symmetry. The cathode 2 with a metal mesh and the collector 3 have the shape of rectangular parallelepipeds. The anode 1 is located inside the cathode 2 and is made in the form of two metal wires electrically connected to each other and stretched parallel to the symmetry axis of the device. Cathode 2 is covered with a nanostructured film of carbon or a material that reduces the electric field strength threshold for field emission of electrons. Parts of the wires are straight-lined to accurately fix their position. Outside, the cathode 2 is covered by a massive ion collector 3.

EFFECT: invention is aimed at increasing productivity while miniaturizing sizes.

1 cl, 2 dwg