UNIT FOR AUTOMATED POLISHING OF THE SIDE SURFACE OF A SPHEROIDAL OPTICAL MICRORESONATOR Russian patent published in 2023 - IPC G02B1/02 B24B37/02 

FIELD: photonics.

SUBSTANCE: invention relates to the process of manufacturing high-quality optical microresonators. The unit for automated polishing of the side surface of the spheroidal optical microresonator comprises a spindle with a fixed workpiece and a suspension supply system. Moreover, there is a machine with a cantilever part, in the spindle of which a holder is fixed, where an optical microresonator is installed, while the machine is equipped with a polishing cylinder fixed with a weight attached to the cantilever part of the machine and connected to the control board, and the polishing cylinder is brought to the polished surface of the optical microresonator, whereas the suspension is supplied using a supply unit with a thin tube located in front of the machine.

EFFECT: automation of the polishing process and production of microresonators with an RMS surface roughness of ~0.7 nm and a high quality factor of the order of 10⁹.

2 cl, 1 dwg