PRESSURE SENSOR Russian patent published in 2023 - IPC G01L9/04 

FIELD: instrumentation.

SUBSTANCE: used to measure pressure with increased accuracy in a wide temperature range. The device contains a housing, a membrane (1) of radius r₁ with a thickened peripheral base (2) made integral with the housing. Strain gauges (R1-R8) are formed on the membrane, made in the form of identical resistive strain gauge elements connected by low-resistance jumpers in the circumferential and radial direction. Strain gauges (R1-R8) are connected in two bridge circuits and are located along the perimeter of the thickened peripheral base (2) opposite each other. In this case, bridge circuits have opposite alternation of strain gauges, due to the sign of the change in their resistance due to pressure. In this case, the strain gauges of the first bridge circuit (R1, R3), connected in the radial direction, are located opposite the strain gauges of the second bridge circuit, connected in the circumferential direction (R5, R7), and the strain gauges of the first bridge circuit (R2, R4), connected in the circumferential direction, located opposite the strain gauges (R6, R8) of the second bridge circuit, connected in the radial direction. Bridge circuits with power diagonals are connected to common contact pads (4). Contact pads (3) of the first bridge circuit and (5) of the second bridge circuit are used for connection to recording equipment. The output diagonals are connected back-to-back, while the dimensions of the sides of the resistive strain gauge elements of the radial and circumferential strain gauges are the same, and the strain gauge elements of the bridge circuits, with their vertices farthest from the center of the membrane (1), are located at the interface between the membrane (1) and the peripheral base (2), and the strain gauges (R1-R8) are made of the same material in a single production process and perceive the same temperature flows.

EFFECT: increasing the accuracy of pressure measurement over the entire operating temperature range and when exposed to thermal shock.

1 cl, 3 dwg