METHOD OF MAKING NANO- AND MICRO-ELECTROMECHANICAL PRESSURE SENSOR SYSTEM AND PRESSURE SENSOR BASED ON SAID SYSTEM Russian patent published in 2010 - IPC G01L9/04 B82B3/00 

FIELD: physics.

SUBSTANCE: method of making a nano- and micro-electromechanical pressure sensor system with tensoresistors fitted on a membrane with a rigid centre involves formation of a heterogeneous structure from nano- and micro-sized films of materials on the planar side of the a metallic membrane with a rigid centre through thermal evaporation. After that radial and circular tensoresistors from identical tensoelements, leads and contact pads for the said tensoresistors are formed on a circle with a uniform radius through photolithography and etching. The radial and circular tensoresistors from identical tensoelements are formed on a circle with radius which is predetermined from a corresponding relationship. The pressure sensor has a case in which there is a nano- and micro-electromechanical system consisting of a membrane with a rigid centre, on which there a heterogeneous structure from thin films of materials sealing the contact board, connecting leads, in which tensoresistors fitted on the arc of the circle and in the radial direction consist of identical tensoelements connected by thin-film jumpers. The centres of the circular and radial tensoelements lie on a circle whose radius is determined using a corresponding relationship.

EFFECT: higher measurement accuracy of pressure sensors having a membrane with a rigid centre through improvement of linearity of the output characteristic under non-steady temperature conditions.

2 cl, 11 dwg