THERMALLY STABLE PRESSURE SENSOR BASED ON NANO-AND MICRO-ELECTROMECHANICAL SYSTEM WITH MEMBRANE HAVING RIGID CENTRE Russian patent published in 2016 - IPC G01L9/04 B82B1/00 

FIELD: measuring equipment.

SUBSTANCE: invention relates to measurement equipment, in particular, to sensors for measuring pressure of liquid and gaseous media under impact conditions of transient temperatures of the medium. Thermally stable pressure sensor based on nano-and micro-electromechanical system includes a housing, wherein nano-and micro-electromechanical system (namems) is installed, consisting of elastic element - membrane with rigid centre, with a peripheral base in the form of revolution shell with annular groove. Heterogeneous structure of thin films of materials is formed on the membrane, in which contact pads are located, resistance strain gauges of identical tensoelements connected by jumpers included in the measuring bridge. Centers of circular and radial tensoelements are located on a circle, radius of which is defined by the proportion: r(x)=(0.744 - 0.0476·cos(4.806x) - 0.07482·sin(4.806x) - 0.01826·cos(9.612x) + 0.005405·sin(9.612x))·r_m, where $$x=\frac{r_0}{r_m}$$ is the ratio of r₀ radius of the rigid centre to r_m membrane radius, wherein the radius of the peripheral base is defined by the proportion: r_u= 1.28r_m.

EFFECT: invention technical result is increase in accuracy by increasing the resistance to thermal shock impact at simultaneous reduction of non-linearity of bridge measuring circuit of the sensor and high sensitivity provision.

1 cl, 6 dwg