METHOD OF MAKING THIN-FILM MOISTURE SENSOR Russian patent published in 2024 - IPC G01N27/12 

FIELD: measuring equipment.

SUBSTANCE: invention relates to measurement equipment, namely to methods of making moisture sensors, which can be used in metrology for measuring moisture content of gas and air media. Method of making a thin-film moisture sensor comprises three steps. Step of preparing the aluminium substrate by grinding, polishing the aluminium cylindrical electrode to class 10-12 of surface finish and degreasing in an alcohol solution for one hour. Step of applying a moisture-sensitive layer to an aluminium substrate by means of micro-arc oxidation, which includes immersing an aluminium substrate in an electrolytic bath containing distilled water, liquid glass with addition of ferroelectric materials, action of electric potential with software-implemented stepwise control of voltage, frequency and duration of pulses. Stage of application of the moisture-permeable layer includes magnetron sputtering of metal with high anticorrosion properties.

EFFECT: increased dielectric permeability of accuracy and increased range of capacitance measurement, which in turn increase speed of operation and accuracy of measurements of moisture sensor.

4 cl, 5 dwg