GAS MOISTURE SENSOR Russian patent published in 2024 - IPC G01N27/22 

FIELD: measurement.

SUBSTANCE: invention relates to measurement equipment and can be used to measure moisture content of gaseous media. Gas moisture sensor comprises a dielectric substrate on which a thin-film planar capacitor is formed in the form of anti-parallel electrodes and contact pads, wherein the anti-parallel electrodes have an oxide coating with thickness of 50 to 200 nm, they are coated with a moisture-sensitive polymer coating with thickness of 0.8 to 1.5 mcm and an electroconductive coating with thickness of 20 to 50 nm above the zone of anti-parallel electrodes. Back-to-back electrodes and electroconductive coating can be made of zirconium or tantalum, and oxide coating is obtained due to their anodic oxidation.

EFFECT: invention provides the possibility of simplifying the design and manufacturing process of the sensor, as well as increasing its sensitivity.

2 cl, 2 dwg