FIELD: physics.
SUBSTANCE: invention relates to devices and methods for producing pure water. Membrane distiller (1) with air channel comprises hot surface (12), cooling section (20) and hydrophobic membrane (30). Hot surface and hydrophobic membrane form tight evaporation channel (40). Surface (22) of cooling section and hydrophobic membrane limit sealed condensation channel (50). Tube (42) for water supply is connected to evaporation channel. Water outlet tube (46) is connected to evaporation channel. Purified water discharge tube (56) is connected to condensation channel. Surface of the cooling section is given a temperature lower than the temperature of water in the evaporation channel. Inert gas feed device (60) comprises heater (62). Gas pipeline system (64) is located in inlet hole (55) of condensation channel to provide flushing of at least condensation channel with inert gas.
EFFECT: providing purified water for washing in a semiconductor production line.
33 cl, 14 dwg
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