METHOD OF POLARIZING POLYMER FERROELECTRICS USING GLOW DISCHARGE PLASMA Russian patent published in 2024 - IPC C08F214/22 H10N30/45 

FIELD: electricity.

SUBSTANCE: invention relates to the technology of producing polymer ferroelectric materials and a method of polarizing polymer ferroelectric films. Invention proposes a method of polarizing polymer ferroelectric film materials with thickness in range of 1 to 100 mcm. Polarization is carried out at low pressure in a vacuum chamber when the polarized sample is exposed to negative ions and electrons of oxygen plasma of a glow discharge in a triode system. Triode system consists of lower grounded electrode, upper negative electrode and control grid between them; wherein the polarized sample is located in a vacuum chamber on the lower grounded electrode, the chamber is pumped out to pressure of 1 Pa and less, after which a controlled supply of oxygen is performed to a pressure of about 10 Pa. Glow discharge plasma is ignited between the upper electrode and the control grid by supplying high-voltage potentials to the upper electrode and the grid so that the grid voltage in absolute magnitude is less than the voltage of the upper electrode. As a result, negative oxygen ions and electrons generated in the glow discharge plasma are drawn by the grounded electrode and accumulate on the surface of the film, forming a virtual electrode, which leads to the formation of an electric field in the sample, which orientates electric dipoles.

EFFECT: disclosed invention increases efficiency of the polarization process due to low probability of sample breakdown during polarization, reduced processing time, no need for heating, possibility of processing large areas of material, uniformity of polarization over the area of the sample, high efficiency of the process.

1 cl, 2 dwg, 2 tbl, 1 ex