MICROELECTROMECHANICAL VIBRATION PRESSURE SENSOR Russian patent published in 2024 - IPC G01L1/10 

FIELD: measuring.

SUBSTANCE: invention relates to measuring equipment and is intended for measuring pressure of liquid and gas media where high accuracy is required and small dimensions of the meter are required. Disclosed is a microelectromechanical vibration pressure sensor comprising a closed measuring cavity mounted on an elastic suspension, a vibration oscillation sensor, a vibrator and a pressure-to-electrical signal converter. Vibration sensor is characterized by the design of an elastic suspension, a measuring cavity, a pressure supply channel and a vibrator on one piezoelectric element made in the form of a hollow cylinder. Vibration oscillation sensor is made as an elastic piezoelectric beam with an inertial mass, the natural frequency of which is adjusted to the frequency of elastic oscillations of the measuring cavity. Vibration oscillation sensor is installed inside the hollow cylinder, and the frequency adjustment of the voltage supplying the vibrator to the natural frequency of elastic oscillations of the measuring cavity is carried out using a phase-locked loop. Additionally, a peak detector is used to convert the vibration amplitude of the measuring beam into an analogue signal carrying information on the damping coefficient of the measuring vibration beam. Damping coefficient is determined by the pressure in the measuring cavity.

EFFECT: reduced dimensions of the pressure sensor without loss of accuracy.

1 cl, 2 dwg