ION SOURCE Russian patent published in 2025 - IPC H01L25/00 

Abstract RU 2841322 C1

FIELD: plasma technology.

SUBSTANCE: gridless ion source comprises a magnet, an external polar magnetic element connected to the magnet through a magnetic conductor, an anode located between the polar magnetic element and the magnet, a base and a reflector located between the magnet and the anode, wherein in base there is through central threaded hole, and the reflector is replaceable and comprises a rod part of the reflector made in such a way that it is possible to attach the rod part of the reflector to the base through the central threaded hole by means of a detachable threaded connection or through insulators.

EFFECT: broader functional capabilities of a gridless ion source.

1 cl, 3 dwg

Similar patents RU2841322C1

Title Year Author Number
ION SOURCE ( VARIANTS ) 2001
  • Alekseev V.V.
  • Zelenkov V.V.
  • Krivoruchko M.M.
  • Kim Dzhon Ehdvard
RU2187218C1
PLASMA ION SOURCE 2008
  • Vavilin Konstantin Viktorovich
  • Kral'Kina Elena Aleksandrovna
  • Pavlov Vladimir Borisovich
  • Ko Seok Keun
  • Li Cheol Su
RU2371803C1
DEVICE FOR HIGH-SPEED MAGNETRON SPUTTERING 2006
  • Chajrev Viktor Ivanovich
  • Choj Dzhun M'En
RU2311492C1
PLASMA PRODUCTION AND ACCELERATION PROCESS AND PLASMA ACCELERATOR WITH CLOSED-CIRCUIT ELECTRON DRIFT IMPLEMENTING IT 1999
  • Vlasov M.A.
  • Ermilov A.N.
  • Zharinov A.V.
  • Kovalenko Ju.A.
  • Novichkov D.N.
RU2156555C1
PLASMA ION SOURCE AND ITS OPERATING PROCESS 2000
  • Bugrov G.Eh.
  • Kondranin S.G.
  • Kral'Kina E.A.
  • Pavlov V.B.
RU2167466C1
MAGNETRON SPRAYING DEVICE 1992
  • Balikoev I.S.
  • Barchenko V.T.
  • Zagranichnyj S.N.
  • Eremeev E.V.
RU2032766C1
HIGH-SENSITIVE IONIZATION VACUUM-GAUGE TRANSDUCER 2017
  • Zhakin Anatolij Ivanovich
  • Pikkiev Valeryan Alekseevich
  • Grimov Aleksandr Aleksandrovich
  • Lutsenko Anton Andreevich
  • Kharlamov Sergej Aleksandrovich
RU2682067C2
PLASMA ELECTRON SOURCE 2002
  • Minakov V.I.
RU2208871C1
ION SPUTTERING DEVICE (VERSIONS) 2014
  • Alekseev Valerij Venediktovich
  • Malinov Aleksej Yurevich
  • Krivoruchko Mark Muratovich
  • Avdienko Aleksandr Andreevich
RU2595266C2
ION SOURCE 1990
  • Zhuravlev B.I.
  • Prilepskij V.V.
  • Nikitinskij V.A.
  • Gorlatov V.S.
RU1766201C

RU 2 841 322 C1

Authors

Vorobev Evgenii Valentinovich

Manegin Denis Sergeevich

Serushkin Sergei Valerevich

Sokolov Vladimir Dmitrievich

Ivakhnenko Sergei Gennadevich

Dates

2025-06-06Published

2024-09-02Filed