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2 032 766

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IPC

(21) (22)

Application

5040282/21, 1992-04-28

(22)

Actual filing date

1992-04-28

(45)

Published

1995-04-10

(72)

Inventor

Balikoev I.S.Barchenko V.T.Zagranichnyj S.N.Eremeev E.V.

(73)

Holder

Sankt-Peterburgskij Gosudarstvennyj Ehlektrotekhnicheskij Universitet Im.V.I.Ul'Janova

MAGNETRON SPRAYING DEVICE Russian patent published in 1995 - IPC

Abstract RU 2032766 C1

FIELD: electron-beam processing. SUBSTANCE: device has in combination, a target cathode, a magnetic system and a magnetic circuit with pole tips. An annular projection provided in the circuit carries a target for spraying and the permanent magnets are made from barium ferrite. EFFECT: improved quality of coating and higher velocity of deposition; layers more uniformly distributed along the surfaces of both magnetic and nonmagnetic materials. 1 dwg

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RU 2 032 766 C1

Authors

Balikoev I.S.

Barchenko V.T.

Zagranichnyj S.N.

Eremeev E.V.

Dates

1995-04-10—Published

1992-04-28—Filed