MODE CONTROL METHOD FOR BEAM-PROCESSING UNIT Russian patent published in 1994 - IPC

FIELD: electrical engineering. SUBSTANCE: unit has power supply 1 with primary source 6, mode control unit 2, electron gun 3 with differential pumping system 29 and beam guide, processing chamber 4, X-ray sensor 5. Control unit 2 is built around electron-beam diodes 10,11. Diode shorting out the gun is connected in series with ballast load 15. Electron beam 28 goes through pumping system 29 to process chamber 4 with object 31 to be heated. X-ray sensor 5 is mounted on axle of chamber 4. In case of beam instability X-ray sensor 5 supplies signal to control unit 2 which cuts off diode 10 and drives in conduction diode 11 which ensures suppression of accelerating field in gun 3 and eliminated emergency breakdown in channel due to control of transient processes. Primary source 6 operated into circuit of diode 11 to maintain constant anode current of gun 3. During switching intervals energy stored in reactance links gradually passes to shorting-out circuit and back thereby affording optimum mode for source 6. Problem of process short circuit in gun is eliminated which determines high efficiency of unit. EFFECT: enlarged functional capabilities of beam-processing unit. 7 dwg