Patenton — panteon of patents

(19)

SU

(11)

1 340 500

(13)

A1

(51)

IPC

(21) (22)

Application

4041096/25, 1986-01-03

(22)

Actual filing date

1986-01-03

(45)

Published

1996-04-20

(72)

Inventor

Danieljan V.S.Evdokimov V.L.Zajdlin G.M.Manzha N.M.Fishel' I.Sh.

METHOD OF PRODUCING ISOLATION OF INTEGRATED CIRCUITS Russian patent published in 1996 - IPC

Abstract SU 1340500 A1

FIELD: microelectronics. SUBSTANCE: method is based upon removing spaces in grooves. The grooves are filled with silicon dioxide by means of pyrolysis of tetrametoxysilane at pressure at the reactor of 133-266. Temperature of the substrates is sustained within 800-880 deg C range. Elimination of spaces reduces technological requirements to profiles of grooves and increases output. EFFECT: simplified technology of production; improved output. 4 dwg, 1 tbl

Similar patents SU1340500A1

Title Year Author Number
METHOD FOR PRODUCING INSULATION ON INTEGRATED-CIRCUIT COMPONENTS 1982
  • Manzha Nikolaj Mikhajlovich
  • Manzha Ljubov' Pavlovna
  • Shurchkov Igor' Olegovich
  • Sulimin Aleksandr Dmitrievich
  • Jachmenev Vladimir Vasil'Evich
  • Kovalenko Galina Petrovna
 SU1840163A1
METHOD OF MANUFACTURING INSULATION FOR ELEMENT OF INTEGRATED CIRCUITS 1982
  • Manzha N.M.
  • Jachmenev V.V.
  • Kokin V.N.
  • Sulimin A.D.
  • Shurchkov I.O.
 SU1111634A1
METHOD OF MANUFACTURING INTEGRATED CIRCUITS WITH SIDE DIELECTRIC INSULATION 1982
  • Manzha N.M.
  • Patjukov S.I.
  • Shurchkov I.O.
  • Kazurov B.I.
  • Popov A.A.
  • Kokin V.N.
 SU1060066A1
METHOD OF CMOS TRANSISTORS MANUFACTURING WITH RAISED ELECTRODES 2006
  • Manzha Nikolaj Mikhajlovich
  • Saurov Aleksandr Nikolaevich
 RU2329566C1
CONSTRUCTION AND METHOD OF MANUFACTURING INTEGRATED CIRCUITS WITH COMBINED INSULATION 1980
  • Manzha N.M.
  • Odinokov A.I.
  • Kokin V.N.
  • Nazar'Jan A.R.
  • Chistjakov Ju.D.
 SU824824A1
METHOD OF MANUFACTURING INTEGRATED CIRCUITS 1984
  • Manzha N.M.
  • Shurchkov I.O.
  • Chistjakov Ju.D.
  • Manzha L.P.
  • Patjukov S.I.
 SU1195862A1
PROCESS OF MANUFACTURE OF INTEGRATED-CIRCUIT TRANSISTOR 1985
  • Manzha N.M.
  • Patjukov S.I.
  • Chistjakov Ju.D.
  • Manzha L.P.
 SU1371445A1
METHOD OF MANUFACTURING SEMICONDUCTING DEVICES WITH NEAR-WALL <P-N>-TRANSITIONS 1983
  • Manzha N.M.
  • Kokin V.N.
  • Kazurov B.I.
  • Chistjakov Ju.D.
  • Patjukov S.I.
  • Shurchkov I.O.
 SU1178269A1
BIPOLAR TRANSISTOR MANUFACTURING PROCESS 1995
  • Lukasevich M.I.
  • Gornev E.S.
  • Mikhajlov V.M.
  • Solov'Eva G.P.
 RU2110868C1
METHOD OF MANUFACTURE OF HIGH-VOLTAGE INTEGRATED CIRCUITS WITH DIELECTRIC INSULATION 1990
  • Brjukhno N.A.
  • Gromov V.I.
  • Sher T.B.
 SU1739805A1

SU 1 340 500 A1

Authors

Danieljan V.S.

Evdokimov V.L.

Zajdlin G.M.

Manzha N.M.

Fishel' I.Sh.

Dates

1996-04-20—Published

1986-01-03—Filed

read Similar patents