METAL ION SOURCE Russian patent published in 1998 - IPC

FIELD: acceleration engineering; process plants. SUBSTANCE: ion source has accelerating system made of cylindrical cathode and anode, plasma generator mounted on anode and incorporating annular magnetic-discharge chamber with diaphragm and magnetic system, as well as power units. Plasma generator cathode is symmetrical relative to accelerator axis and made, for example, in the form of metal rods arranged over circumference in end part of anode; ignitor electrode of plasma generator is mounted along device axis and made in the form of, say, disk concentric to generator cathode. Ions produced are discharged by accelerating voltage towards substrate. EFFECT: improved reliability due to increased stability of discharge. 1 dwg