FIELD: electricity.
SUBSTANCE: vacuum-arc generator with louver system of plasma filtration from particles contains a cooled cathode 1 in a shape of a blunted cone, an igniter electrode 3 installed at the conical surface of the electrode 1, a cylindrical cooled cathode 4 installed coaxially with the cathode 1, a vacuum-arc power supply unit 5 connected between the cathode 1 and anode 4, a power supply unit 6 of igniter electrode 3 connected by its negative output to the cathode 1, an axially symmetrical louver system of conical electrodes 7 inserted into each other and interconnected in series and in opposite, which are connected to a power supply unit 9 and positive output of the power supply unit 8, the latter is connected by its second output to the arc evaporator anode, over the anode, before and after the louver system there is at least one electromagnetic coil 10, 11, 12, and before the louver system of electrodes, in an axial alignment with it, there is an auxiliary cooled anode 13. In the centre of the cathode 1 there is an opening shaped as the opposite blunted cone in regard to the cathode external surface and electrodes 7 of the louver system are shaped as a conical multi-turn helix line. In the central part of the cathode, in the plane of the blunted cone with low diameter, there is a disc 2 of heat-resisting material. The louver system is a double-electrode system. The electrodes 7 of the louver system and the auxiliary anode 13 are made so that no working area of the cathode, including its conic surfaces, is visible directly from any point behind the louver system. The electrodes 7 have gaps of different length between the neighbouring turns of the conical helix line.
EFFECT: improving efficiency of plasma passage through the louver system of electrodes and of ion current at the output.
6 cl, 1 dwg
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Authors
Dates
2014-05-20—Published
2012-11-14—Filed