CAPACITIVE MATRIX PRESSURE SENSOR AND ITS MANUFACTURING PROCESS Russian patent published in 1994 - IPC

Abstract SU 1655193 A1

FIELD: measurement technology. SUBSTANCE: sensor has dielectric film layer, intermediate film (flexible member) with holes, and two metallized films. Capacitor plates, screens, and sensor leads are applied to two films by metal spraying. Thickness of flexible member is selected to be 2 to 2.5 times greater than that of diaphragm. Process involves stretching of film and flexible member at temperature not exceeding their softening point before forming metallized plates, leads, and screens on upper and lower films. Permissible pressure is increased due to increase in film modulus of elasticity. EFFECT: improved measurement accuracy, increased high value of pressure measurement range. 2 cl, 4 dwg

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SU 1 655 193 A1

Authors

Kazarjan A.A.

Dates

1994-01-30Published

1989-03-22Filed