CAPACITIVE MATRIX PRESSURE SENSOR Russian patent published in 1994 - IPC

FIELD: measurement technology. SUBSTANCE: sensor has five layers of polyamide film. One of them, film 11, is perforated. Metallized plates 7, 10, 15, 17 with leads and screens are applied to fifth and third layers of film on both sides. Screen 2 is also applied to first dielectric film. Second layer of film functions as insulator between first and third layers of sensor. Capacitor plates on third layer (on bottom and top surfaces of dielectric film) are symmetrically displaced from one other and top-to-bottom plate distance ratio is unity. Ratio of distances between capacitor plates on upper surface of fifth layer and those on third surface of dielectric film is between 1.8 and 2.0. Solid plate 15 on bottom surface of fifth layer is common for all capacitors. These plate-to-plate distance ratios and specific design of film layers improve sensor sensitivity and enlarge its functional capabilities, for example, its informative capacity. EFFECT: improved sensitivity of pressure measurement at several points on model surface. 2 dwg