CAPACITIVE MATRIX PRESSURE SENSOR Russian patent published in 1994 - IPC

Abstract SU 1598631 A1

FIELD: measurement technology. SUBSTANCE: sensor has four polyamide film layers 1, 2, 6, 10, leads 3, 11, plates 4, 13, and shields 5, 14. Sensitivity of thin-film sensor is increased due to holes 9 which are interconnected and connected to environment to equalize static pressure. Layer 6 is three or four times thicker than upper film. EFFECT: provision for measuring low levels of pressure pulsations within comprehensive range of static pressures. 1 dwg

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SU 1 598 631 A1

Authors

Kazarjan A.A.

Chikin I.I.

Dates

1994-01-30Published

1989-02-03Filed