CAPACITIVE MATRIX PRESSURE SENSOR Russian patent published in 1994 - IPC

Abstract SU 1729198 A1

FIELD: measurement technology; measurement of pressure pulsation within the range of 100 to 40,000 Pa at static pressure of 10⁷ Pa. SUBSTANCE: sensor has insulating layer of dielectric film, perforated film with cells, two metallized films; sensor diaphragm is made of polyamide film base foil. Capacitor plates, screens, and leads are applied by metal spraying on surface of upper film. Sensor plate thickness is selected to be 30 to 167 times greater than that of metal layer on surface of polyamide film obtained by vacuum metallization. EFFECT: increased high value of measurement range and improved reliability due to provision for equalizing static pressure for which purpose sensor is provided with supporting holes communicating with cells through grooves. 4 dwg

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SU 1 729 198 A1

Authors

Kazarjan A.A.

Dates

1994-01-30—Published

1990-01-30—Filed