METHOD FOR MANUFACTURING CAPACITOR-TYPE TRANSDUCER OF MECHANICAL QUANTITIES Russian patent published in 1995 - IPC

FIELD: measurement technology. SUBSTANCE: method involves manufacture of top and bottom glass boards with metallized plates and central silicon board that has frame and moving plate attached to it, interconnection of boards, and connection of their external leads by forming tentative protection in vicinity of slots and jumpers on nonplanar side before silicon etching, etching of silicon on planar side through depth (0,05...0,1)h_orig-h_jump within these regions, where h_orig is original thickness of plate and h_jump is thickness of jumpers, removal of tentative protection, two-sided opposing etching of silicon through depth [0,3-(0,005-0,01)]h_orig+0,5h_jump, formation of silicon dioxide film by thermal oxidation, formation of ports on it on planar side corresponding to configuration of jumpers, plate, and frame, boron alloying to concentration higher than 7·10¹⁴ cm^-3 through depth h_jump, removal of masking film, and final etching of silicon in 25-30% aqueous solution of ethylenediamine to form through slits and jumpers. EFFECT: improved sensitivity of transducer and increased output of serviceable products. 9 dwg