FIELD: instrument engineering.
SUBSTANCE: invention relates to instrument-making and can be used in making elastic elements used in structures of silicon sensitive elements of micromechanical sensors – accelerometers, resonators, angular velocity sensors. Method of making integral converters involves performing photolithography operations on opening windows to form elastic elements on the non-working side of the plate only over a flat, planar surface not containing relief, which considerably improves the quality of the topolithic pattern of structures of the integral converter formed by photolithography.
EFFECT: invention provides an increase in the yield of non-defective articles due to photolithography operations on flat surfaces which do not contain a relief.
1 cl, 1 dwg
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