FIELD: microelectronics. SUBSTANCE: beam of neutral atoms is formed on basis of resonance interaction with field of standing wave of monochromatic electromagnetic radiation. In this case atoms are accelerated to constant velocities by action on them with combination of concomitant and counter propagating radiations. Beam is focused by passing atoms line of maxima of spatial interferential pattern converging to processing object formed by radiation opposite to motion of atoms generated by at least three point sources of polarized radiation arranged in symmetry. Concomitant radiation is polarized in same plane as counter propagating one, is matched with cooling radiation and is focused on to symmetry center of system. Distribution of atoms over cross-section of beam is controlled by adjustment of lateral distribution of intensity of Concomitant radiation. Device for implementation of method includes sources of coherent radiation, mirror with hole and source of neutral atoms manufactured in the form of hollow cylinder from refractory material lined with working substance and provided with windows in face walls and heater. EFFECT: increased quality and resolving power of manufactured microcircuits, expanded range of used materials. 9 cl, 9 dwg
