ION SOURCE OF ELECTROHYDRODYNAMIC TYPE Russian patent published in 1996 - IPC

FIELD: microtechnology. SUBSTANCE: source has base insulator 1, cylindrical post 2, control electrode 3, flange 4 with low-voltage lead-ins 5, heater 6, reservoir 8 with ionizable substance 8, emitter 9 in form of needle point covered with liquid ionizable substance and passing through hole in reservoir bottom. Upper end of needle after its installation in source is fastened on holding tab 10. Needle of emitter is made in form of cable twisted from several, for instance seven, thin, refractory metal wires and sintered in vacuum at a temperature near wire melting temperature. Central wire 11 is arranged along axis of symmetry of ion source, and other wires are spiral wound around central wire. Conical needle point 12 is made by mechanically sharpening sintered cable. Inner capillary channels formed between wires along which liquid substance passes from reservoir extend almost to tip of point. Owing to the fact that channels are closed, substance is not subjected to oxidizing and contamination when source is opened. EFFECT: enhanced stability of ion source characteristics, increased duration of continuous operation. 3 dwg