GEAR FOR MAGNETIC DISPERSION OF MATERIALS IN VACUUM Russian patent published in 1996 - IPC

FIELD: electronics. SUBSTANCE: invention relates to deposition of coats in vacuum and can be used in technological vacuum installations for formation of articles of electronics, radio engineering, optics and so on. Gear for magnetron dispersion of materials in vacuum includes substrated holder with drive for its rotation, anode, magnetron system with two cathodes and disc targets truncated on side placed at angle to axis of substrate holder which axes cross on side of substrate holder, magnetic system with polarpieces of opposite polarity having horse shoe shape with opposing positioning of ends placed with clearances between them. EFFECT: increased rate of deposition of coats and enhanced utilization factor of material of target. 2 dwg, 1 tbl