DEVICE FOR ION-PLASMA APPLICATION OF FILMS IN VACUUM Russian patent published in 2002 - IPC

FIELD: technology of coatings application in vacuum, particularly, devices of magnetron type for ion-plasma spraying; applicable in application of films to articles in electronic, instrumentation, optical and other industries, particularly, as optical coatings and sensitive layers of gas sensors. SUBSTANCE: device has working chamber accommodating anode 2, cathode 1 with target, magnetic systems 6 and 7 installed in nonworking side of target, means for target cooling and substrate holder with articles to be coated. Target is made of base 3 on which continuous layer of euthectic alloy 4 liquid at room temperature. A layer of powder mixture of oxides of sprayed material is applied to surface of euthectic layer 4. EFFECT: simplified design of device for ion-plasma application of oxide multicomponent films in vacuum with various percentage of components. 11 cl, dwg