APPARATUS FOR ION-PLASMA SPRAYING OF MATERIALS IN VACUUM Russian patent published in 1995 - IPC

Abstract SU 1697453 A1

FIELD: electronics, radio engineering, optics SUBSTANCE: apparatus has magnetron system, that has code, target, pole pieces, anode and base Symmetry axes of base holder and target form angle of 18 26 deg. Center of target is shifted from base holder axis by value of ( 0.1 - 0.4) D and is spaced from it by (0.1 0.5) D. In the case average diameter of clearance between pole pieces is equal to (0.6 -0.8) D, with D diameter of base. Apparatus for ion-plasma spraying of materials in vacuum has target and base holder. EFFECT: increased factor of sprayed material useful usage. 1 dwg

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SU 1 697 453 A1

Authors

Levchenko G.T.

Nedybaljuk A.A.

Odinokov V.V.

Dates

1995-11-20Published

1989-09-19Filed