FIELD: electronics, radio engineering, optics SUBSTANCE: apparatus has magnetron system, that has code, target, pole pieces, anode and base Symmetry axes of base holder and target form angle of 18 26 deg. Center of target is shifted from base holder axis by value of ( 0.1 - 0.4) D and is spaced from it by (0.1 0.5) D. In the case average diameter of clearance between pole pieces is equal to (0.6 -0.8) D, with D diameter of base. Apparatus for ion-plasma spraying of materials in vacuum has target and base holder. EFFECT: increased factor of sprayed material useful usage. 1 dwg
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Authors
Dates
1995-11-20—Published
1989-09-19—Filed