FIELD: glow-discharge instruments. SUBSTANCE: device may be used in ion sources for implantation units, for instruments which separate isotopes by electromagnetic methods, in physical investigations, controlled nuclear synthesis and other applications. Cathode is made from materials with low coefficient of ion evaporation, while holding units are made from graphite. This results in possibility of efficient heating of cathode unit. This means possibility to increase its cross section size and provides uniform heating. Combined heating proved to be reliable and efficient for different materials and for wide range of discharge currents and voltage levels. EFFECT: increased service life of cathode. 1 dwg
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Authors
Dates
1996-05-10—Published
1990-04-19—Filed