METHOD AND APPARATUS FOR IONIC TREATMENT OF MACHINES PIECES AND TOOLS Russian patent published in 1997 - IPC

FIELD: methods and apparatuses of ionic treatment of machines pieces and tools by beams of ions. SUBSTANCE: piece surface is subjected to ionic clearance by beam of argon ions, produced from gas discharge plasma with ions high concentration of ((10¹⁰-10¹³cm^-3)) in gas discharge chamber under argon pressure of 0,7 - 4,7 Pa and on treated piece surface pressure of working gas pressure P_wg and partial pressure of surface polluting gasses P_pf is kept from conditions: P_pg= 10^-2-10^-3Pa, P_pg≪(2,2•10^-2•j₂+S_wg•M1/2pg

/f, with j₊ - argon ions current density A/A/cm², S_f - polluting film spraying factor, atom/ion, M_pg - molar weight of polluting gas, T - temperature of the gas, K. f - factor of molecules or atoms of polluting gas adhesion to piece surface. After clearance protective layer is applied on working surface and implantation of nitrogen ions is exercised till metal nitride is formed on piece surface. Apparatus has cylindrical gas discharge chamber and located in it along circumference and in height of outer wall cathodes of direct filament voltage, ionic-optical system made in the form of mounted in gas discharge chamber three coaxial electrodes with slots for focusing and acceleration of nitrogen or argon or mixed beams in radial planes directed to axis of apparatus, evaporator, anode made as two rings, power supply system and system of vacuum pumping. Quoter electrode is inner wall of gas discharge chamber. Anode and evaporator are located in gas discharge chamber. As a version apparatus has located on gas discharge chamber outer surface permanent magnets. Cathodes of filament direct voltage are made of tungsten or its alloys, or of hexaboride of lanthanum as small wires or bifilar winding. EFFECT: improved quality of machines pieces and tools treatment by ions beams. 7 cl, 7 dwg, 2 tbl