VACUUM TREATMENT PLANT AND METHOD OF VACUUM TREATMENT Russian patent published in 2013 - IPC C23C14/24 C23C14/06 C23C16/26 C23C30/00 C23C28/00 

Abstract RU 2472869 C2

FIELD: electricity.

SUBSTANCE: treatment is carried out in a vacuum chamber (1), in which a device is installed for generation of an electric low-voltage arc discharge (15) (LVAD), a carrier (7) of an item for reception and displacement of items (2) and at least one input (8) for an inertial and/or a reaction gas. The LVAD comprises a cathode (10) and an anode (13) electrically connected with a cathode via an arc generator. The item carrier (7) is electrically connected with a voltage shift generator (16). At least some surface of the anode (13) includes graphite lining.

EFFECT: when operating under high temperature, arc stability is provided, anode contamination is prevented in process of coating application.

41 cl, 7 dwg, 8 ex, 1 tbl

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RU 2 472 869 C2

Authors

Ramm Jurgen

Vidrig Beno

Kazemann Shtefan

Pimenta Marselo Dornelles

Massler Orlav

Khanzel'Mann Barbara

Dates

2013-01-20Published

2008-04-22Filed