METHOD OF PRODUCTION OF THE REFLECTIVE COATINGS Russian patent published in 2007 - IPC C23C14/00 

FIELD: laser technology; methods of production of the reflective coatings.

SUBSTANCE: the invention is pertaining to the laser technology and may be used for production of the coatings made out of gold or platinum on the optical components of the lasers. The method of production of the reflective coating made out of the methyl derivatives of β-diketonates of gold or platinum, in which the mass transfer is exercised by the stream of the noble gas, before the thermal gaseous phase decomposition conduct the mixing of the stream of the noble gas with the stream of hydrogen near to the working surface of the wafer. The thermal gaseous phase decomposing conduct is exercised in the commixed gas stream, and the metal deposition is conducted at the temperature of the wafer of 190°С ÷ 260°С with the simultaneous withdrawal from the reaction zone of the organic products of the decomposition. The technical result of the invention is the increase of the coating reflective factor, the adhesion power, the purity and the mechanical stability.

EFFECT: the invention ensures the increase of the coating reflective factor, the adhesion power, the purity and the mechanical stability.

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