PROCESS DETERMINING ELLIPSOMETRIC PARAMETERS OF OBJECT (VERSIONS) Russian patent published in 2000 - IPC

FIELD: ellipsometry in situ of optically anisotropic bodies. SUBSTANCE: process involves simultaneous usage of object, standard and number of fluxes of polarized electromagnetic waves with identical number of frequencies, splitting out of reference parts from fluxes prior to interaction with object, sending of split-out reference parts to standard and the rest of information parts left after split-out to object at some angles of incidence different for each flux, splitting of reference parts after interaction with standard and of information parts with object in each flux of polarized electromagnetic waves into four reference and four information beams with different types of polarization correspondingly for reference and information beams, spectrum decomposition of beams into subbeams corresponding to frequencies in fluxes of polarized electromagnetic waves, simultaneous measurement of their intensity and determination of ellipsometric parameters of object by relations common for corresponding frequencies in each flux of polarized electromagnetic waves and selection of number of fluxes of polarized electromagnetic waves and frequencies in them in correspondence with requirements of task of in situ determination of state of object in real time. Provision for identical conditions for input and output of reference parts to standard and information parts to object and for propagation of fluxes of polarized electromagnetic waves and their subbeams in correspondence with reference and information parts over entire path from moment and place of split-out of reference parts to moment and place of measurement of intensity of subbeams, compensation for hardware phase difference for corresponding reference and information subbeams in each flux of polarized electromagnetic waves. Invention is applicable to any fast and superfast processes, pulse processes and modes in situ. EFFECT: enhanced informativity of process. 7 cl, 1 dwg