SPECTRAL ELLIPSOMETER Russian patent published in 2005 - IPC

FIELD: optics, electronics.

SUBSTANCE: device has serially placed along optical axis radiation source, collimating optics, polarizer, analyzer, polychrome device with photo-detector, electrically connected to control and signal processing block, both polarizer and analyzer are made in form of identical oppositely directed two prisms serially placed on optical axis, of which first one - separates light beam on two orthogonally polarized, passing in parallel, and second one - connecting these again as one, obturator placed on electric engine shaft, which is connected electrically to control block, two optic couples having electric connection to control block, interrupters for which are two circular ports tracks made in obturator, crossing respectively first and second beams, while ports in ring tracks are placed periodically, with displacement in outer and inner rings relatively to one another for 1/2 period, and made in synchronously rotating with same frequency obturators of polarizer and analyzer with off-duty factor 1/4 and 1/2 respectively, while in measurement polarizer azimuth is +30°, and analyzer azimuth is -30°.

EFFECT: higher speed of operation and higher precision.

4 dwg