CAPACITIVE MATRIX PRESSURE SENSOR Russian patent published in 1994 - IPC

Abstract RU 2018099 C1

FIELD: measurement technology. SUBSTANCE: sensor has five dielectric films, two of them being perforated, sensitive elements. The sensor is characterized in that perforations are of hexahedral shape, sensitive elements of the sensor for measuring integral and discrete values of pressure pulsations are disposed on an upper and lower surfaces of third dielectric film, respectively, and plates for polarization of the sensor are formed contunuous on the upper surface of first dielectric film and on lower surface of the fifth dielectric film. EFFECT: enhanced accuracy. 7 dwg

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RU 2 018 099 C1

Authors

Kazarjan A.A.

Dates

1994-08-15Published

1992-02-24Filed