FIELD: measurement technology. SUBSTANCE: capacitor plates and thermocouple electrodes are combined. Dielectric polyimide film 9 serves as pressure sensitive element. Plates 6, 11 of pressure measuring capacitor serve simultaneously as second electrode of thermocouple. Thermocouple are formed by vacuum deposition of copper and nickel. Sensitive element is protected against external electromagnetic interferences. Aluminium as dielectric insulation. EFFECT: higher measurement results. l dwg
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RU2116636C1 |
