CAPACITIVE PRESSURE TRANSDUCER Russian patent published in 1998 - IPC

FIELD: measurement technology. SUBSTANCE: invention is related to capacitive transducers and can be employed to measure pressure pulsations on surface of deformed articles and to extract deformation signal from basic pressure signal. Thin-film capacitive transducer has two groups of sensitive elements for recording of signal from action of pressure and deformation of article. Membrane ( first film 1 ) of first group of sensitive elements is bonded on to surface of article 18. Second group of sensitive elements for recording of signal generated by action of pressure is positioned above surface of sensitive elements of first group uniaxially to it. In this case second membrane ( eighth film 15 ) of transducer is under direction action of pressure. Design of such transducer is developed on bases of eight metallized and nonmetallic dielectric films. Range of measured pressure pulsations is from 0.1 to 1000.0 Pa. measurement results are processed in special manner. EFFECT: expanded application field, diminished measurement error. 1 dwg