PRESSURE AND TEMPERATURE-SENSITIVE ELEMENT Russian patent published in 2000 - IPC

FIELD: measurement technology, measurement of pressure and temperature in aviation equipment and mechanical engineering. SUBSTANCE: pressure and temperature-sensitive element is built on base of four dielectric films. Coats of pressure and temperature-sensitive element are formed on one axis on both surfaces of fourth film and on upper surface of second film. Copper and nickel are chosen as materials of these coats. Third film is perforated one. Process of manufacture of pressure and temperature-sensitive element includes technology of deposition of copper and nickel on surface of polyimide film. Lower coats are formed after metallization with the help of electric engraving. Upper coats are formed in vacuum through masks. Coats are fastened together with adhesive. EFFECT: expanded application field, increased functional reliability, widened lower measurement range. 2 cl, 1 dwg