METHOD OF MEASUREMENT OF PARAMETERS OF OUTSIDE ACTION ON MEDIUM OR OBJECT AND DEVICE TO IMPLEMENT IT Russian patent published in 1994 - IPC

Abstract RU 2021590 C1

FIELD: measurement technology. SUBSTANCE: flux of electromagnetic radiation excites surface electromagnetic wave in metal film. Reference medium is placed in this case in zone of propagation of electromagnetic radiation and/or surface electromagnetic wave. Electric signal between metal film and semiconductor substrate carries information on outside actions which change parameters of reference medium. EFFECT: improved authenticity of measurement of parameters. 22 cl, 7 dwg

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RU 2 021 590 C1

Authors

Nikitin Petr Ivanovich

Beloglazov Anatolij Anatol'Evich

Dates

1994-10-15—Published

1993-03-31—Filed