FIELD: manufacture of semiconductor devices. SUBSTANCE: device has working tank for etching in two media made in the form of two coaxial cylinders whose butt ands are joined through cone at angle of inclination of walls through maximum 60 deg. Lower cylinder bottom is made as detachable shell. Tank is provided with perforated holder and rod with end cap both mounted for reciprocating movement with aid of cyclic-rotation shaft and cam gear. Rod end is perforated and its diameter is equal to inner diameters of shell and contacting portion of lower cylinder. EFFECT: improved design. 2 dwg
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