DEVICE FOR CHEMICAL SEPARATION OF SEMICONDUCTOR PLATES TO CRYSTALS Russian patent published in 2018 - IPC H01L21/78 

FIELD: electrical engineering.

SUBSTANCE: invention relates to devices for chemical liquid separation of semiconductor wafers onto crystals without the use of mechanical devices and electric power. Device for chemical separation of semiconductor wafers into crystals contains a working container, perforated elements and a removable set of masks, in which the arrangement of the grooves coincides with the arrangement of the regions of separation into crystals, the perforated elements – the base and the lid, the lid is seated on the base, and the diameter of the perforation hole and the distance from the lower plane of the cover to the upper plane of the semiconductor plate or the top plane of the removable masks does not exceed the minimum dimension of the crystal face.

EFFECT: invention provides an increase in the yield of suitable crystals, reduces energy consumption, raises the ergonomics of the device, makes it possible to form crystals of various shapes.

1 cl, 5 dwg